Authors | Agung Shamsuddin Saragih, Tae Jo Ko |
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Publication Name | The International Journal of Advanced Manufacturing Technology |
Abstract | Micro-abrasive jet machining (μ-AJM) is a fast and flexible technique for micro-patterning of brittle materials and can be combined with patterned mask made from a material with excellent photolithographic properties. Here, we demonstrate a fabrication method for the realization of a passive micromixer with third-dimensional feature by using a μ-AJM process with employing photopolymer as a mask on a glass slide target. We fabricated the mask using SU8, a photosensitive polymer, applied as a micro-pattern for μ-AJM process. The design and fabrication of the proposed micromixer is the first reported for such a device. Three glass layers were successfully bonded in a single step using a direct bonding method. These three bonded glass layers with micro-patterns etched on them were the realization of third-dimension feature on the micromixer design. |
Publisher | Springer Verlag |
ISSN | 0268-3768 |
Page | 474–481 |
Volume | 42 |
Impact Factor (JCR) | 1.568 |
SJR | 0.915 |
Ranking Quartile | Q1 |
Website | http://link.springer.com/article/10.1007/s00170-008-1619-x# |