rpm-ftui
Authors Agung Shamsuddin Saragih, Tae Jo Ko
Publication Name The International Journal of Advanced Manufacturing Technology
Abstract

Micro-abrasive jet machining (μ-AJM) is a fast and flexible technique for micro-patterning of brittle materials and can be combined with patterned mask made from a material with excellent photolithographic properties. Here, we demonstrate a fabrication method for the realization of a passive micromixer with third-dimensional feature by using a μ-AJM process with employing photopolymer as a mask on a glass slide target. We fabricated the mask using SU8, a photosensitive polymer, applied as a micro-pattern for μ-AJM process. The design and fabrication of the proposed micromixer is the first reported for such a device. Three glass layers were successfully bonded in a single step using a direct bonding method. These three bonded glass layers with micro-patterns etched on them were the realization of third-dimension feature on the micromixer design.

Publisher Springer Verlag
ISSN 0268-3768
Page 474–481
Volume 42
Impact Factor (JCR) 1.568
SJR 0.915
Ranking Quartile Q1
Website http://link.springer.com/article/10.1007/s00170-008-1619-x#