Authors | Whulanza, Y., Istiyanto, J. , Supriadi, S. |
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Publication Name | 13th International Conference of Quality in Research, Yogyakarta |
Abstract | A common UV lithography technology uses a series of instruments which are spin-coater, hot plate and UV curing system. This had restrained the application of UV lithography technology in a laboratory with limited resource. The purpose of this work is focused on how to produce and characterize microstructures with our home-made instruments. The thickness of around 100mm was achieved by our system. Furthermore, an optimum condition for UV curing was also characterized in term of exposure dose (J/cm2). |
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Ranking Quartile | Q5 |
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