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Title
Author
Publication
No.
Title
Author
Year
Publication Name
Abstract
241
Pilot-scale electron cyclotron resonance-metal organic chemical vapor deposition system for the preparation of large-area fluorine-doped SnO2 thin films
Bup Ju Jeon, Chairul Hudaya, Joong Kee Lee
2016
Journal of Vacuum Science & Technology A
23
24
25
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